Improved sub-threshold slope in short-channel vertical MOSFETs using FILOX oxidation
- 31 July 2009
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 53 (7), 753-759
- https://doi.org/10.1016/j.sse.2009.02.016
Abstract
No abstract availableKeywords
Funding Information
- Engineering and Physical Sciences Research Council
- Kungliga Tekniska Högskolan
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