A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator
- 21 February 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 80 (1), 77-83
- https://doi.org/10.1016/s0924-4247(99)00298-8
Abstract
No abstract availableKeywords
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