An electrostatic probe technique for RF plasma
- 1 August 1987
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 20 (8), 1046-1049
- https://doi.org/10.1088/0022-3735/20/8/018
Abstract
The use of electrostatic probes in radio frequency (RF) generated plasmas is discussed. A technique is demonstrated in which the RF potential difference between probe and plasma is removed by driving the probe with synchronous RF of suitable phase and amplitude. An application of this technique is the measurement of electrical structure within a 13.56 MHz argon discharge.Keywords
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