Laser annealing of ohmic contacts on GaAs
- 1 April 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 38 (7), 562-564
- https://doi.org/10.1063/1.92413
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Q-switched ruby laser alloying of Ohmic contacts on gallium arsenide epilayersApplied Physics Letters, 1978
- Formation of ohmic contacts to III–V semiconductors, using a laser beamSolid-State Electronics, 1974
- Models for contacts to planar devicesSolid-State Electronics, 1972