13.56MHz hollow cathode jet matrix plasma source for large area surface coating
- 28 February 1999
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 112 (1-3), 366-372
- https://doi.org/10.1016/s0257-8972(98)00778-6
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
- 70cm radio frequency hollow cathode plasma source for modification of foils and membranesSurface and Coatings Technology, 1997
- Multi-jet hollow cathode discharge for remote polymer depositionSurface and Coatings Technology, 1997
- A novel remote technique for high rate plasma polymerization with radio frequency plasmasSurface and Coatings Technology, 1996
- Radio frequency hollow cathodes for the plasma processing technologySurface and Coatings Technology, 1996
- Remote deposition of scratch resistant films by use of slot antenna microwave plasma sourceThin Solid Films, 1996
- Remote and direct microwave plasma deposition of HMDSO films: comparative studySurface and Coatings Technology, 1995
- Langmuir probe measurements in commercial plasma plantsPlasma Sources Science and Technology, 1994
- Some problems related to the performance of an evaporator as a vapor delivery systemJournal of Crystal Growth, 1991
- New way for high-rate a-Si depositionJournal of Non-Crystalline Solids, 1987
- Attachment of amino groups to polymer surfaces by radiofrequency plasmasJournal of Applied Polymer Science, 1969