Epitaxial diamond thin films on (001) silicon substrates
- 28 June 1993
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 62 (26), 3438-3440
- https://doi.org/10.1063/1.109041
Abstract
Epitaxial (001) diamond film were grown on mirror-polished single-crystalline (001) silicon substrates by microwave plasma chemical vapor deposition from a methane/hydrogen gas mixture. The films were characterized by means of scanning electron microscopy, Raman spectroscopy, and x-ray analysis. The results show that the diamond crystallites are oriented to the silicon substrate with both the (001) planes and the [110] directions parallel to the silicon substrate.Keywords
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