Modelling and experimental studies of properties of TiN coatings
- 1 January 1993
- journal article
- review article
- Published by Springer Nature in Journal of Materials Science
- Vol. 28 (8), 1989-2006
- https://doi.org/10.1007/bf00367555
Abstract
No abstract availableKeywords
This publication has 71 references indexed in Scilit:
- Activated reactive ion plating (ARIP)Surface and Coatings Technology, 1989
- Influence of Tin Coating on Wear of High Speed Steel Tools as Studied by New Laboratory Wear TestSurface Engineering, 1989
- Technical note: A review of cathodic arc plasma deposition processes and their applicationsSurface and Coatings Technology, 1987
- Assessment of Coating HardnessSurface Engineering, 1987
- Reactively sputtered nitrides and carbides of titanium, zirconium, and hafniumJournal of Vacuum Science & Technology A, 1986
- Very high rate reactive sputtering of TiN, ZrN and HfNThin Solid Films, 1983
- Plasma-assisted deposition processes: Theory, mechanisms and applicationsThin Solid Films, 1983
- Color of titanium nitride prepared by reactive dc magnetron sputteringJournal of Vacuum Science and Technology, 1982
- Preparation of titanium nitride by a pulsed d.c. magnetron reactive deposition techniques using the moving mode of depositionThin Solid Films, 1980
- Activated Reactive Evaporation Process for High Rate Deposition of CompoundsJournal of Vacuum Science and Technology, 1972