Evaluation of gas mixtures with different sensitive layers incorporated in hybrid FET structures
- 30 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 19 (1-3), 678-681
- https://doi.org/10.1016/0925-4005(93)01128-q
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Fabrication of a hybrid field-effect structure for gas detection with diverse sensitive materialsSensors and Actuators B: Chemical, 1994
- New suspended gate FET technology for physical deposition of chemically sensitive layersSensors and Actuators A: Physical, 1990