Preferential sputtering in binary targets
- 30 June 1995
- journal article
- review article
- Published by Elsevier in Progress in Surface Science
- Vol. 49 (2), 155-196
- https://doi.org/10.1016/0079-6816(95)00036-x
Abstract
No abstract availableKeywords
This publication has 78 references indexed in Scilit:
- Alloy sputtering at high fluence: preferential sputtering and competing effectsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Physical sputtering of CuNi alloys: a molecular dynamics studyNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- Compositional depth profiling by sputteringProgress in Surface Science, 1991
- Ion beam modification of metals: Compositional and microstructural changesProgress in Surface Science, 1989
- Bombardment-induced compositional change with alloys, oxides, oxysalts, and halidesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Mechanisms and theory of physical sputtering by particle impactNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- A summary of the theory of the preferential sputtering of alloysMaterials Science and Engineering, 1985
- On the problem of whether mass or chemical bonding is more important to bombardment-induced compositional changes in alloys and oxidesSurface Science, 1980
- Abstract: Sputtering of multicomponent metal and semiconductor targetsJournal of Vacuum Science and Technology, 1979
- An attempt to understand preferential sputteringNuclear Instruments and Methods, 1978