Y-Ba-Cu-O superconducting films prepared on SrTiO3 substrates by chemical vapor deposition

Abstract
High Tc superconducting YBa2 Cu3 O7−x films were prepared by chemical vapor deposition using β‐diketonates of Y, Ba, and Cu as source materials. The films were epitaxially grown on SrTiO3 (100) substrates. The c‐axis orientation perpendicular to the plane of the substrates was observed. A sharp resistive superconducting transition with Tc (R=0) at 84 K was obtained. The maximum critical‐current density at 77 K was 2×104 A/cm2 .