Morphology of SiSiO2 interface
- 31 August 1980
- journal article
- Published by Elsevier in Surface Science
- Vol. 98 (1-3), 154-166
- https://doi.org/10.1016/0039-6028(80)90487-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The Si/SiO2 interface examined by cross-sectional transmission electron microscopyApplied Physics Letters, 1977
- Auger depth profiling of interfaces in MOS and MNOS structuresJournal of Vacuum Science and Technology, 1976
- Effect of Thin Oxide Film on Breakdown Voltage of SiliconN+PJunctionJapanese Journal of Applied Physics, 1974