A low actuation voltage electrostatic actuator for RF MEMS switch applications
- 18 July 2007
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 17 (8), 1649-1656
- https://doi.org/10.1088/0960-1317/17/8/031
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
- Single crystal silicon cantilever-based RF-MEMS switches using surface processing on SOIPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- RF MEMS for ubiquitous wireless connectivity. Part I. FabricationIEEE Microwave Magazine, 2004
- Integrated RF-MEMS switch based on a combination of thermal and electrostatic actuationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2004
- A Comparison between RF MEMS Switches and Semiconductor SwitchesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2004
- Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cyclesJournal of Microelectromechanical Systems, 2003
- Electromechanical considerations in developing low-voltage RF MEMS switchesIEEE Transactions on Microwave Theory and Techniques, 2003
- RF MEMS switches and switch circuitsIEEE Microwave Magazine, 2001
- RF MEMS from a device perspectiveJournal of Micromechanics and Microengineering, 2000
- A low-voltage actuated micromachined microwave switch using torsion springs and leverageIEEE Transactions on Microwave Theory and Techniques, 2000
- Micromechanical Membrane Switches on SiliconIBM Journal of Research and Development, 1979