Integrated RF-MEMS switch based on a combination of thermal and electrostatic actuation
- 6 May 2004
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1714-1717
- https://doi.org/10.1109/sensor.2003.1217115
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- An above-IC RF-MEMS switchPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- RF MEMS from a device perspectiveJournal of Micromechanics and Microengineering, 2000