Theory of polymer ablation
- 12 December 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (24), 2377-2379
- https://doi.org/10.1063/1.100235
Abstract
A new formula is presented for the etch depth l per pulse of an excimer laser of fluence F. Incremental ablation is defined as the etch depth per pulse after many pulses. We show that l is proportional to F, rather than ln(F).Keywords
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