Electrical properties of thin Co2Si, CoSi, and CoSi2 layers grown on evaporated silicon
- 1 January 1984
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 13 (1), 95-105
- https://doi.org/10.1007/bf02659838
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Electrical characteristics of thin Ni2Si, NiSi, and NiSi2 layers grown on siliconJournal of Electronic Materials, 1983
- Refractory silicides for integrated circuitsJournal of Vacuum Science and Technology, 1980
- Handbook of Refractory CompoundsPublished by Springer Nature ,1980
- Electrical characteristics of palladium silicideSolid-State Electronics, 1978