Reactive plasma deposited SixCyHz films
- 1 June 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 60 (2), 193-200
- https://doi.org/10.1016/0040-6090(79)90189-5
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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