Measurement of angular distribution of noble metals by low keV ion sputtering
- 2 August 1988
- journal article
- other
- Published by Elsevier in Surface Science
- Vol. 202 (3), L603-L606
- https://doi.org/10.1016/0039-6028(88)90037-4
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Angular distribution of Ag atoms sputtered with A 5 keV Ar+ ion beamNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Sputtering of two alloy systems by polyatomic ions: AgAu and CuZnNuclear Instruments and Methods in Physics Research, 1983
- Surface segregation during alloy sputtering and implantationNuclear Instruments and Methods in Physics Research, 1983
- Sputtering of the gallium-indium eutectic alloy in the liquid phaseSurface Science, 1983
- Sputtering of multicomponent materials: Elements of a theoryNuclear Instruments and Methods in Physics Research, 1982