A new masking technology for deep glass etching and its microfluidic application
- 1 September 2004
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 115 (2-3), 476-482
- https://doi.org/10.1016/j.sna.2003.12.013
Abstract
No abstract availableThis publication has 26 references indexed in Scilit:
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