Silicon sensors: full of promises and pitfalls

Abstract

Silicon, as a sensor material, permits the integration of a sensing element and a signal-processing circuit on a single chip. In order that this attractive concept can be realised for a given measurand, it is necessary that, (i) silicon shows a suitable physical or chemical effect, (ii) a sensor can be designed based on this effect and (iii) the sensor is compatible with the desired circuit technology. This paper presents an overview of the most important effects in silicon, the latest additions to the silicon sensor family and the first attempts to integrate sensors and circuits on one chip. Based on the experience acquired to date, the silicon sensor and the 'smart sensor' concepts are analysed and a discussion of the promises and pitfalls given.