Glow-Discharge Deposition of a-Si: H from Pure Si2H6 and Pure SiH4

Abstract

Optical emission spectroscopy and mass spectrometry have been employed as diagnostic tools for studying the glow discharge plasma of pure SiH₄ and pure Si₂H₆. It has been suggested that the dimeric species play an important role in the deposition of a-Si: H from Si₂H₆ glow discharge in contrast to the monomeric species of SiH dominant in the deposition from pure SiH₄. A large amount of hydrogen which is not bonded with Si is incorporated in a-Si: H films prepared from Si₂H₆ and this might be reflected in the dark and photoconductivity of the films.