Thermodynamics of Silicon Nitride and Oxynitride

Publisher Website

1 January 1977

book chapter
Published by Springer Nature

p. 183-185
https://doi.org/10.1007/978-94-010-1298-0_13

Abstract

No abstract available

This publication has 1 reference indexed in Scilit:

Silicon Oxynitride Stability
Science, 1969

Cited by 37 articles