Silicon Oxynitride Stability
- 26 September 1969
- journal article
- other
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 165 (3900), 1363-1364
- https://doi.org/10.1126/science.165.3900.1363
Abstract
Silicon oxynitride occurs as a mineral (sinoite) in meteorites. Equilibrium measurements are reported which provide information on the approximate ratios of pressures of oxygen to nitrogen required for existence of this phase under equilibrium conditions at elevated temperatures. This ratio is approximately 10-15 at 1400° to 1500°C.Keywords
This publication has 4 references indexed in Scilit:
- A Low-Stress Insulating Film on Silicon by Chemical Vapor DepositionJournal of Applied Physics, 1968
- Properties of Si[sub x]O[sub y]N[sub z] Films on SiJournal of the Electrochemical Society, 1968
- The enstatite chondritesGeochimica et Cosmochimica Acta, 1966
- Silicon Oxynitride: A Meteoritic MineralScience, 1964