Broadly-tunable resonant-cavity light-emitting diode
- 1 November 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 7 (11), 1267-1269
- https://doi.org/10.1109/68.473467
Abstract
Microelectromechanical wavelength tuning is demonstrated for the first time in a resonant-cavity light-emitting diode. The device utilizes a deformable-membrane top mirror suspended by an air gap above a diode-active region and bottom mirror. Applied membrane-substrate bias produces an electrostatic force which reduces the air-gap thickness, and therefore, the resonant wavelength. We report broad tunability of nearly 40 nm and spectral linewidths as narrow as 1.9 nm (2.6 meV) for operation near 950 nm.Keywords
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