The influence of oxygen partial pressure on the properties of DC reactive magnetron sputtered titanium oxide films
- 1 July 1993
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 68 (3), 319-325
- https://doi.org/10.1016/0169-4332(93)90251-6
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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