Construction and performance of a magnetron sputtering apparatus
- 1 January 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 18 (1-6), 651-654
- https://doi.org/10.1016/s0168-583x(86)80104-5
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Diagnostic methods for sputtering plasmasJournal of Vacuum Science and Technology, 1978
- Planar magnetron sputteringJournal of Vacuum Science and Technology, 1978
- Magnetron sputtering: basic physics and application to cylindrical magnetronsJournal of Vacuum Science and Technology, 1978