Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators
- 1 January 2003
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 103 (1-2), 150-155
- https://doi.org/10.1016/s0924-4247(02)00307-2
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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