Thermally excited silicon oxide beam and bridge resonators in CMOS technology
- 1 January 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 40 (10), 1745-1753
- https://doi.org/10.1109/16.277330
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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