Electron bombardment ion source with small energy spread and high brightness
- 1 October 1986
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 19 (10), 819-822
- https://doi.org/10.1088/0022-3735/19/10/012
Abstract
The design and the operating conditions of a new electron bombardment ion source are described. The ion source produces an ion beam with a small kinetic energy spread of 0.1-0.5 eV (full width at half maximum) and a relatively high brightness of up to 50 A sr-1 m-2 for a kinetic energy of 200 eV.Keywords
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