Morphological and compositional properties of MoSe2 films prepared by r.f. magnetron sputtering
- 1 June 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 116 (4), 367-372
- https://doi.org/10.1016/0040-6090(84)90117-2
Abstract
No abstract availableKeywords
Funding Information
- Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung
This publication has 4 references indexed in Scilit:
- Morphological and frictional behavior of sputtered MoS2 filmsThin Solid Films, 1982
- Friction properties of sputtered dichalcogenide layersTribology International, 1981
- Sputtered MoS2 lubricant coating improvementsThin Solid Films, 1980
- Lubrication properties of r.f. sputtered MoS2 layers with variable stoichiometryThin Solid Films, 1979