Surface Acoustic Wave Based Pressure Sensor with Ground Shielding over Cavity on 41° YX LiNbO3

Abstract

A surface acoustic wave (SAW)-based pressure sensor was fabricated for stable mechanical compression force measurement. A single phase unidirectional transducer (SPUDT) and two acoustic tracks were employed to minimize inherent insertion loss and improve reflectivity from the reflectors. The coupling of modes (COM) theory and finite element methods (FEMs) were used to determine optimal design parameters. A LiNbO₃ diaphragm was bonded to a heavily doped silicon substrate with a cavity of ∼250 µm deep, in which gold was lined all over the inner cavity to reduce the coupling loss of SAW energy to the surrounding atmosphere. As a mechanical compression force was applied to the diaphragm, the diaphragm bent, resulting in phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of mechanical compression applied. The measured reflection coefficient S₁₁ showed good agreement with simulated results.