Analysis of an RF induction plasma torch with a permeable ceramic wall

Abstract

An analysis is made for an rf plasma torch with a permeable ceramic tube as the contaminant tube. The temperature, flow, and electromagnetic fields in the rf torch are obtained along with the argon flow, the gas and matrix temperatures. The results show that about 80% of the plasma radiation losses are trapped by the ceramic wall. For optimum cooling, a wall with variable thickness is proposed. The results also indicate that argon is not a suitable gas for cooling the permeable wall.