Microfabrication and evaluation of diffractive optical filters prepared by reactive sputter etching
- 1 June 1979
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 50 (6), 3841-3848
- https://doi.org/10.1063/1.326499
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Influence of the Angle of Incidence on Sputtering YieldsJournal of Applied Physics, 1959