Reactive sputtering of PTFE films in argon-CF4 mixtures
- 1 July 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 52 (2), 231-235
- https://doi.org/10.1016/0040-6090(78)90141-4
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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