A continuum model for low-pressure radio-frequency discharges
- 15 June 1991
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (12), 8047-8051
- https://doi.org/10.1063/1.347451
Abstract
A computational model for low-pressure (<0.3–0.5 Torr) radio-frequency glow discharges is presented. The governing equations are the first three moments of the Boltzmann transport equations. In order to describe the weakly collisional sheaths, the nonlinear inertia terms in the momentum equations are retained. The model is demonstrated for a 13.56-MHz argon discharge. A parametric study involving variations in pressure, electrode spacing, and driving voltage is presented.Keywords
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