Formation kinetics of MoSi2 induced by cw scanned laser beam
- 1 July 1982
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 41 (1), 46-48
- https://doi.org/10.1063/1.93323
Abstract
Scanned cw laser beams at different scan velocities from 10 to 400 cm/s have been used to study the interaction of thin metal films of molybdenum deposited by electron beam evaporation with single‐crystal silicon substrate. Backscattering technique has been used to investigate the growth mechanism of hexagonal silicide MoSi2 as a function of the number of repetitive laser scans. Silicide layers are found to grow at a rate proportional to the square root of the effective annealing time in the whole range of scan velocities. Effective annealing temperatures are calculated for each laser annealing condition, and from an Arrhenius plot a mean value of activation energy for MoSi2 growth is estimated.Keywords
This publication has 8 references indexed in Scilit:
- Influence of cw laser scan speed in solid-phase crystallization of amorphous Si film on Si3N4/glass substrateApplied Physics Letters, 1981
- Metal Silicon Reactions Induced by CW Scanned Laser and Electron BeamsJournal of the Electrochemical Society, 1981
- Refractory silicides for integrated circuitsJournal of Vacuum Science and Technology, 1980
- Calculation of solid-phase reaction rates induced by a scanning cw laserJournal of Applied Physics, 1980
- Temperature distributions produced in semiconductors by a scanning elliptical or circular cw laser beamJournal of Applied Physics, 1980
- Thin-film Mo-Si interactionApplied Physics Letters, 1979
- 1 /spl mu/m MOSFET VLSI technology. VII. Metal silicide interconnection technology - A future perspectiveIEEE Journal of Solid-State Circuits, 1979
- Reaction kinetics of molybdenum thin films on silicon (111) surfaceJournal of Applied Physics, 1978