Molecularly Adsorbed Oxygen Species on Si(111)-(7×7): STM-Induced Dissociative Attachment Studies
- 19 April 1996
- journal article
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 272 (5260), 385-388
- https://doi.org/10.1126/science.272.5260.385
Abstract
Scanning tunneling microscope (STM)-induced selective bond breaking in individual molecules and conventional STM imaging are combined to determine the nature of chemisorbed O2 species formed during the initial stages of silicon (111)-(7×7) oxidation. A selective atomic-scale modification mechanism that involves dissociative electron attachment of tip-emitted electrons to empty adsorbate orbitals is introduced. Two molecular species were found: one involves O2 bonded to an already oxidized silicon adatom, and the other involves an O2 molecule that is bonded to a second-layer rest atom and interacting with two silicon adatoms.Keywords
This publication has 38 references indexed in Scilit:
- Possibility of coherent multiple excitation in atom transfer with a scanning tunneling microscopePhysical Review B, 1994
- Scanning tunneling microscopy (STM) studies of the chemical vapor deposition of Ge on Si(111) from Ge hydrides and a comparison with molecular beam epitaxyThe Journal of Chemical Physics, 1994
- Scanning-tunneling-microscopy observation of thermal oxide growth on Si(111)7×7 surfacesPhysical Review B, 1993
- A theoretical study of the initial stages of Si(111)–7×7 oxidation. II. The dissociated state and formation of SiO4The Journal of Chemical Physics, 1993
- A theoretical study of the initial stages of Si(111)–7×7 oxidation. I. The molecular precursorThe Journal of Chemical Physics, 1993
- The interaction of molecular and atomic oxygen with Si(100) and Si(111)Surface Science Reports, 1993
- Successive oxidation stages and annealing behavior of the Si(111) 7×7 surface observed with scanning tunneling microscopy and scanning tunneling spectroscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Low-energy electron scattering from molecules on surfacesJournal of Physics B: Atomic, Molecular and Optical Physics, 1990
- Atom-resolved surface chemistry using the scanning tunneling microscopeThe Journal of Physical Chemistry, 1990
- Initial stages of oxygen adsorption on Si(111). II. The molecular precursorPhysical Review B, 1989