Analysis of plasma enhanced chemical vapour deposition‐grown Borophosphosilicate glass with a combination of Rutherford backscattering and elastic recoil detection
- 1 July 1986
- journal article
- Published by Wiley in Surface and Interface Analysis
- Vol. 9 (5), 293-296
- https://doi.org/10.1002/sia.740090505
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Depth profiling of hydrogen by detection of recoiled protonsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984