Thermal stability of silicide on polycrystalline Si
- 1 December 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 253 (1-2), 479-484
- https://doi.org/10.1016/0040-6090(94)90370-0
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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