Preparation of Evaporated Silicon Films
- 1 January 1963
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 34 (1), 11-12
- https://doi.org/10.1063/1.1718107
Abstract
A simple method for preparing evaporated thin films of silicon from an etched silicon filament is described. The method of mounting and processing the filament ensures low gas evolution during evaporation and makes possible the deposition of silicon films in a vacuum of ∼5×10−10 Torr.Keywords
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