Comparison of lateral and vertical switches for application as microrelays
- 1 January 1999
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 9 (2), 146-150
- https://doi.org/10.1088/0960-1317/9/2/310
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Surface-micromachined electrostatic microrelaySensors and Actuators A: Physical, 1998
- Electrostatic curved electrode actuatorsJournal of Microelectromechanical Systems, 1997