Oxygen segregation on a dislocation core in germanium studied by electron energy loss spectroscopy

Abstract
Nanoanalyses performed on a dislocation core in germanium give evidence of oxygen precipitation : a few hundreds of oxygen atoms at a mean concentration of 5 % were detected. A radiation induced oxygen desorption is also observed under the electron beam for which a mixed knock-on and ionization process is proposed. This phenomenon is the main limiting factor for a more quantitative analysis