Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
- 23 December 2007
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 143 (1), 1-6
- https://doi.org/10.1016/j.sna.2007.12.005
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A versatile surface channel concept for microfluidic applicationsJournal of Micromechanics and Microengineering, 2007
- MEMS flow sensors for nano-fluidic applicationsSensors and Actuators A: Physical, 2001
- Toward thermal flow-sensing with pL/s resolutionPublished by SPIE-Intl Soc Optical Eng ,2000
- Micromachining of buried micro channels in siliconJournal of Microelectromechanical Systems, 2000
- Inhibition of acid etching of Pt by pre-exposure to oxygen plasmaApplied Physics Letters, 1984