A versatile surface channel concept for microfluidic applications
- 5 September 2007
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 17 (10), 1971-1977
- https://doi.org/10.1088/0960-1317/17/10/007
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- A High-resolution Silicon Monolithic Nozzle Array For Inikjet PrintingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A variable temperature, resonant density sensor made using an improved chip-level vacuum packageSensors and Actuators A: Physical, 2003
- Suspended microchannel resonators for biomolecular detectionApplied Physics Letters, 2003
- Fabrication of flexible polymer tubes for micro and nanofluidic applicationsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Low-temperature anodic bonding to silicon nitrideSensors and Actuators A: Physical, 2000
- Micromachining of buried micro channels in siliconJournal of Microelectromechanical Systems, 2000
- A CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminium etchingSensors and Actuators A: Physical, 1999
- A silicon resonant sensor structure for Coriolis mass-flow measurementsJournal of Microelectromechanical Systems, 1997
- Etching technology for chromatography microchannelsElectrochimica Acta, 1997
- LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design*Journal of Vacuum Science & Technology A, 1996