The effect of substrate temperature on the properties of sputtered titanium oxide films
- 1 March 1993
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 65-66, 235-239
- https://doi.org/10.1016/0169-4332(93)90664-w
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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