Ion-plated HfN coatings
- 17 August 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 118 (3), 271-277
- https://doi.org/10.1016/0040-6090(84)90197-4
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- R.f.-sputtered silicon and hafnium nitrides: Properties and adhesion to 440C stainless steelThin Solid Films, 1983
- Very high rate reactive sputtering of TiN, ZrN and HfNThin Solid Films, 1983
- Adhesion and hardness of ion-plated TiC and TiN coatingsThin Solid Films, 1983
- Some properties of r.f.-sputtered hafnium nitride coatingsThin Solid Films, 1982
- Residual compressive stress in sputter-deposited TiC films on steel substratesThin Solid Films, 1981
- High rate deposition of hafnium nitride by activated reactive evaporation (ARE)Thin Solid Films, 1979
- Machining evaluation of cemented carbide tools coated with HfN and TiC by the activated reactive evaporation processThin Solid Films, 1978
- ber das pseudotern re System ?HfO??HfN?HfCMonatshefte für Chemie / Chemical Monthly, 1975
- Structure and Electrical Properties of Sputtered Films of Hafnium and Hafnium CompoundsJournal of Applied Physics, 1970
- Hochschmelzende Systeme mit Hafniumkarbid und -nitridMonatshefte für Chemie / Chemical Monthly, 1960