Arrays of microdischarge devices having 50–100 [micro sign]m square pyramidal Si anodes and screen cathodes

Abstract

Microdischarge devices having (50–100 µm)2 pyramidal Si anodes and metal screen cathodes have been operated continuously at Ne gas pressures up to 1350 Torr and voltages below 95 V. More than 34 µW of output power is produced by a single device in a solid angle of ~5 × 10-2 sr for a Ne pressure of 500 Torr. 3 × 3 arrays of these devices have been fabricated.