Planar microdischarge arrays

Abstract

Planar arrays of 400 µm diameter discharge devices fabricated on silicon with an anode-cathode spacing of 1 mm and device separations as small as 0.8 mm are reported. Operated in parallel with a single ballast and specific power loadings in the discharge up to ~40 kW-cm–3, these arrays produce continuous emission from the atomic rare gases and transient molecules such as the rare gas-halide excimer, xenon-monoiodide (XeI).