Diagnostic microstructures for the measurement of intrinsic strain in thin films
- 1 June 1992
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 2 (2), 86-95
- https://doi.org/10.1088/0960-1317/2/2/004
Abstract
No abstract availableKeywords
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