The structure of silicon nitride films. III. Oxidation of Silicon Nitride — Defects
- 16 February 1979
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 51 (2), 375-381
- https://doi.org/10.1002/pssa.2210510208
Abstract
No abstract availableKeywords
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- Conversion of silicon nitride into silicon dioxide through the influence of oxygenSolid-State Electronics, 1971
- Properties of Si[sub x]O[sub y]N[sub z] Films on SiJournal of the Electrochemical Society, 1968