Nonlinear effects in heavy-ion sputtering
- 1 February 1974
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 45 (2), 953-954
- https://doi.org/10.1063/1.1663348
Abstract
To test the suggestion that an enhancement of sputtering occurs in very dense collision cascades, the sputtering yield per atom was compared for atomic and molecular ions. In all cases tested, the yield per atom was higher for the molecular ions. This effect is the more pronounced the heavier the projectile and the target. In the molecular cases the overlapping cascades have higher energy densities than those initiated by the atomic ions; our results, therefore, support the suggestion of a sputtering enhancement in dense cascades.Keywords
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